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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., Takatsuki, JP

Scientific Publications

Patents Assigned to Matsushita Electronics Corporation - Justia...

patents.justia.com

Justia - Patents - Patents and Patent Application Resources

half-pitch hp node: Topics by Science.govwww.science.gov › topicpages › half-pitch+hp+node

www.science.gov

... of Cadence Design Systems Inc. (USA) and Yoshimitsu Okuda of Toppan Printing Co., Ltd., Japan) were invited to represent each key technical area. We also ...

Publications

Evaluation of quartz dry etching profile for the PSM lithography...

spie.org

Proceedings Paper Evaluation of quartz dry etching profile for the PSM ... (Japan) Masao Otaki, Toppan Printing Co., Ltd. (Japan) Yoshimitsu Okuda, Toppan ...

Miscellaneous

Comparison of CD variation between organic and inorganic bottom...

www.spiedigitallibrary.org

SPIE Digital Library Proceedings

Kiyoshi Carrero - (82 registros encontrados) - Inicio

206-225-85-34.dedicated.abac.net

74883I (2009); Kiyoshi Kageyama, Katsuyuki Miyoko, Yoshimitsu Okuda, Jesus.

Through-pitch and through-focus characterization of AAPSM for ArF...

www.vde-verlag.de

22nd European Mask and Lithography Conference; Through-pitch and through-focus characterization of AAPSM for ArF immersion lithography

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