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Contacts - SINTEFwww.sintef.no › projectweb › mems-pie › contacts

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Feb 10, · Paul Muralt Phone: + Internet: www.epfl.ch. RTD Partner. University of Twente-IMS P.O.Box 217

Materials & Process Integration for MEMS | Paul Muralt, Nicolas ...es.b-ok.as › book

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Materials & Process Integration for MEMS | Paul Muralt, Nicolas Ledermann (auth.), Francis E. H. Tay (eds.) | download | Z-Library. Download books for free.

Handbook of Silicon Based MEMS Materials and Technologiesbooks.google.com › books

books.google.com

... Japan Gerhard Mu ̈ller EADS Innovation Works, Mu ̈nchen, Germany Paul Muralt EPFL, Lausanne, Switzerland Risto M. Nieminen Department of Applied Physics ...

Materials & Process Integration for MEMSbooks.google.com › books

books.google.com

2 POROUS SILICON AS A SACRIFICIAL LAYER IN PRODUCTION OF 24 Paul Muralt, Nicolas Ledermann, Jacek J. Baborowski and Sandrine Gentil.

Piezoelectric MEMS Resonatorsbooks.google.com › books

books.google.com

Processing. and. Basic. Properties. Paul Muralt Introduction. Piezoelectric thin films are of interest for micro-electromechanical systems (MEMS) ...

All web results to the name "Paul Muralt"

(e31,f) piezoelectric coefficient of PZT thin films for MEMS deviceswww.spiedigitallibrary.org › full

www.spiedigitallibrary.org

Tensile and compressive stress dependency of the transverse (e31,f) piezoelectric coefficient of PZT thin films for MEMS devices. Klaus Prume, Paul Muralt, ...

Symposium A53 MEMS/NEMS for Sensorial and Actorial Materialsjournals.sagepub.com › doi

journals.sagepub.com

Dirk Lehmhus, Jürgen Brugger, Paul Muralt, Salvador Pané, Olgaç Ergeneman, Nelson Bradley, Marc-Alexandre Dubois, Nicolas de Rooij, Nikhil Gupta, ...

2nd International Workshop on Piezoelectric MEMS | International...

www.piezomems2011.org

Piezoelectric thin film synthesis & properties; Integration; Testing and instrumentation; Applications; Cooperative European projects. We thank all participants for the lively and stimulating discussions and in particular the individual presenters for their contributions. Paul Muralt Chair. Stacks Image © Peter Ulrich ...

Power MEMS 2013

powermems2013.org

Paul Muralt is currently adjunct Professor at Swiss Federal Institute of Technology EPFL at Lausanne, Switzerland. He leads a group in piezoelectric thin film, MEMS, and nanotechnology activities at the Ceramics Laboratory of the Materials Science Institute. He has studied solid-state physics and accomplished a PhD work ...

Plenary Speakers

isaf-iwatmd-pfm2017.weebly.com

Paul Muralt is titular professor at Swiss Federal Institute of Technology EPFL at Lausanne, Switzerland. He leads a group in piezoelectric thin film, MEMS, and nanotechnology activities within the Materials Science Institute. Having a background (PhD) in solid state physics, he moved more and more into thin films, surface, ...

(PDF) Qualification and Applications of a Piezoelectric MEMS Process...

www.academia.edu

162 (2003) [3] Klaus Prume, Paul Muralt, Member, IEEE, Florian Calame, Thorsten Schmitz-Kempen, and Stephan Tiedke ”Piezoelectric thin films: Amplitude [Pa/V] 2 Evaluation of electrical and electromechanical Phase [ rad] characteristics for MEMS devices”, IEEE 0 Trans. Ultrasonics, Ferroelectrics and ...

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