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Veeco CNT ships 500th ALD system to NCSU

www.semiconductor-today.com
AS‐SuA5 – ‘Developing a Full Wafer‐scale Approach Towards High ALD Selectivity on Copper vs Low‐K (and Oxides) using a Single ALD/SAMS Platform’ by Laurent Lecordier (Ultratech) and S. Armini and S. Herregods (IMEC, Belgium);

Veeco CNT Ships 500th ALD System - Veeco

www.veecokorea.com
... Full Wafer‐scale Approach Towards High ALD Selectivity on Copper vs Low‐K (and Oxides) using a Single ALD/SAMS Platform, Laurent Lecordier, Ultratech; ...
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