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Low-cost MEMS fabrication technology using a replica ...

www.nanowerk.com
Nov 21, · Nov 21, 2012: Low-cost MEMS fabrication technology using a replica molding technique (Nanowerk News) Kazuma Kurihara and Hideki Takagi, Large Scale Integration Team, the Research Center for Ubiquitous MEMS and Micro Engineering of the National Institute of Advanced Industrial Science and Technology (AIST), have developed a microelectromechanical systems …
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