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Rectangular planar-type icp antenna having...

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Inventors: Tae-Un Kim, Se-Jin Lee, Kyung-Hwan Jang, Seung-Ho Lee, Jeong-Beom Ryeo USPTO Applicaton #: # Class: I (USPTO) Class 118

Antenna of plasma processing apparatus -...

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Title: Antenna of plasma processing apparatus Inventors: Seung-Ho Lee, Jeong-Beom Ryeo USPTO Applicaton #: # Class: (USPTO)

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ICD CO., LTD., Seoul, KR, US

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Patent US Rectangular planar-type ICP...

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Tae-Un Kim, Se-Jin Lee, Kyung-hwan Jang, Seung-ho Lee, Jeong-Beom Ryeo: Original Assignee: Tae-Un Kim, Se-Jin Lee, Jang Kyung-Hwan, Lee Seung-Ho, Jeong-Beom Ryeo:

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