Harutaka Mekaru and X-Ray - Free people check

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Fabricating needle arrays with a gray-scale x-ray mask: SPIE...

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A gray-scale mask for x-ray lithography, made using microelectromechanical systems technology, offers a new approach to manufacturing needle arrays.

Harutaka Mekaru | XanEdu Customization Platform

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Author: Harutaka Mekaru. Results. Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization Springer ...

Review of Scientific Instruments, 2002, V 73, N 3, March.

library.iem.ac.ru

... three-dimensional microstructure fabrication utilizing hard x-ray lithography of synchrotron radiation Tadashi Hattori, Harutaka Mekaru, and Yuichi Utsumi pp.

Fabrication and evaluation of a grayscale mask for x-ray lithography...

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Harutaka Mekaru. Takayuki Takano. National Institute of Advanced Industrial Science. and Technology ͑AIST͒. Advanced Manufacturing ...

Performance of SU-8 Membrane Suitable for Deep X-Ray ...

www.mdpi.com

Harutaka Mekaru. Research Center for ... Mekaru, H. Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography. Micromachines 2015, 6, View ...

Fabricating needle arrays with a gray-scale x-ray mask

spie.org

A gray-scale mask for x-ray lithography, made using microelectromechanical systems technology, offers a new approach to manufacturing needle arrays.

A Si stencil mask for deep X-ray lithography fabricated by MEMS...

rd.springer.com

TECHNICAL PAPER A Si stencil mask for deep X-ray lithography fabricated by MEMS technology Harutaka Mekaru Æ Takayuki Takano Æ Yoshiaki Ukita Æ Yuichi Utsumi Æ ...

Micromachines | Free Full-Text | Performance of SU-8 Membrane ...

www.mdpi.com

Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography. Harutaka Mekaru. Research Center for Ubiquitous MEMS ...

A Si stencil mask for deep X-ray lithography fabricated | IMS320:...

ims320vanderbilt.wordpress.com

Harutaka Mekaru, Takayuki Takano, Yoshiaki Ukita, Yuichi Utsumi, Masaharu Takahashi Microsyst Technol (2008) 14:1335–1342 Purpose: ...

A Si stencil mask for deep X-ray lithography fabricated by MEMS ...www.infona.pl › resource

www.infona.pl

Harutaka Mekaru. National Institute of Advanced Industrial Science and Technology, Advanced Manufacturing Research Institute, Tsukuba, Japan ...

A novel fabrication method of needle array combined x-ray gray mask...

www.spiedigitallibrary.org

SPIE Digital Library Proceedings

A novel fabrication method of needle array combined X-ray gray mask ...

www.spiedigitallibrary.org

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda, "A novel fabrication method of needle array combined X-ray gray ...

Design of solenoidal electromagnetic microactuator utilizing 3D X-ray...

www.infona.pl

Harutaka Mekaru. University of Hyogo, Laboratory of Advanced Science and Technology for Industry, Hyogo, Japan ...

LIGA process

www.academicconcepts.net

Harutaka Mekaru Abstract LIGA process has been developed in the 2.5-dimensional world. We introduced new technologies of a 3D X-ray lithography and a worm ...

Scientific Paper on SU-8 Membrane Fabrication by National ...

www.samcointl.com

Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography Harutaka Mekaru Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME ...

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Harutaka Mekaru and X-Ray Free People Check